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4.1 for N+ poly-silicon and 5.2 for P+ poly-silicon. That is supposedly the "classical CMOS value." These values depend on doping concentration in the poly-silicon and the specific sample. Thus, it may be best to determine them yourself if you need a more exact value.

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Silicon-on-insulator technology: materials to VLSI pg.136

By Jean-Pierre Colinge

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13y ago

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Q: Work function of poly silicon gate?
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