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All computer chips have been made out of transistors, you cannot make them out of vacuum tubes.

The first monolithic IC chip (see image above) was made at Texas Instruments in 1958 on a bar of germanium (not silicon), it was a simple audio amplifier.

The first digital logic monolithic IC chips were built around 1961 or 1962.

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Coleman Lesch

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Q: What was the first computer to use computer chips made of transistors?
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